JPH01141010U - - Google Patents
Info
- Publication number
- JPH01141010U JPH01141010U JP3673888U JP3673888U JPH01141010U JP H01141010 U JPH01141010 U JP H01141010U JP 3673888 U JP3673888 U JP 3673888U JP 3673888 U JP3673888 U JP 3673888U JP H01141010 U JPH01141010 U JP H01141010U
- Authority
- JP
- Japan
- Prior art keywords
- processing head
- semiconductor wafer
- drive motor
- turntable
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3673888U JPH01141010U (en]) | 1988-03-18 | 1988-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3673888U JPH01141010U (en]) | 1988-03-18 | 1988-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01141010U true JPH01141010U (en]) | 1989-09-27 |
Family
ID=31263328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3673888U Pending JPH01141010U (en]) | 1988-03-18 | 1988-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01141010U (en]) |
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1988
- 1988-03-18 JP JP3673888U patent/JPH01141010U/ja active Pending